Introduction
.Hight Pumping Speed
.Low Oil Back Stream
.High Fore-Vacuum Pressure
.Precise Leak Test By Helium Leak Detector
.Protection From Oil Loss Of Backing System By Fore Line Baffle
.Oil Level Gauge(OPTION)
.Thermal Sensor(OPTION)
Features
*.Pumping Speed:570 l/sec
*.Ultimate Pressure:
Without Baffle:5*10(-7)Torr
With Baffle:1*10(-7) Torr
*.Oil Backstream Rate:
Without Baffle:2.5*10(-2) mg/cm2.min
Air Cooled Baffle:7.5*10(-4) mg/cm2.min
Water Cooled Baffle:2*10(-4) mg/cm2.min
*.Oil Capacity:150ml
*.Electrical Main Supply:220V/1 ∮
*.Warm-up Time:20 min
*.Cooling Water Flow:1.5 l/min
*.Fore-Vacuum Pressure:2*10(-1)Torr
*.Heater Power:700W
Diffusion Pumps-擴散幫浦
Model DPF-6Z
Introduction
.Hight Pumping Speed
.Low Oil Back Stream
.High Fore-Vacuum Pressure
.Precise Leak Test By Helium Leak Detector
.Protection From Oil Loss Of Backing System By Fore Line Baffle
.Oil Level Gauge(OPTION)
.Thermal Sensor(OPTION)
Features
*.Pumping Speed:1200 l/sec
*.Ultimate Pressure:
Without Baffle:5*10(-7)Torr
With Baffle:1*10(-7) Torr
*.Oil Backstream Rate:
Without Baffle:2.5*10(-2) mg/cm2.min
Water Cooled Baffle:2*10(-4) mg/cm2.min
*.Oil Capacity:340ml
*.Electrical Main Supply:220V/1 ∮
*.Warm-up Time:20 min
*.Cooling Water Flow:3.0 l/min
*.Fore-Vacuum Pressure:2*10(-1)Torr
*.Heater Power:1KW
Diffusion Pumps-擴散幫浦
Model DPF-8Z
Introduction
.Hight Pumping Speed
.Low Oil Back Stream
.High Fore-Vacuum Pressure
.Precise Leak Test By Helium Leak Detector
.Protection From Oil Loss Of Backing System By Fore Line Baffle
.Oil Level Gauge(OPTION)
.Thermal Sensor(OPTION)
Features
*.Pumping Speed:1950 l/sec
*.Ultimate Pressure:
Without Baffle:5*10(-7)Torr
With Baffle:1*10(-7) Torr
*.Oil Backstream Rate:
Without Baffle:2.5*10(-2) mg/cm2.min
Water Cooled Baffle:2*10(-4) mg/cm2.min
*.Oil Capacity:500ml
*.Electrical Main Supply:220V/1 ∮
*.Warm-up Time:25 min
*.Cooling Water Flow:4.0 l/min
*.Fore-Vacuum Pressure:2*10(-1)Torr
*.Heater Power:1.5KW
GHP-1300 Rotary Pump-旋轉油式幫浦
Model GHP-1300
Introduction
.Sliding Vane Type Duble Stage.
.Small Size, Light Weight.
.Low Noise.
.Easy Maintenance.
.Anti-Oil Back Stream.
Features
*.Pumping Speed: 50Hz :1300 l/min
60Hz: 1600 l/min
*.Ultimate Pressure
Gas Ballast Valve Close: 5*10(-4) Torr
Gas Ballast Valve Open: 1*10(-2) Torr
*.Power: 220V/380V/3∮*3.7kW
*.Oil Capacity:3.5~6.2
*.Cooling: Air cooling
GHP-1600 Rotary Pump-旋轉油式幫浦
Model GHP-1600
Introduction
.Sliding Vane Type Duble Stage.
.Small Size, Light Weight.
.Low Noise.
.Easy Maintenance.
.Anti-Oil Back Stream.
Features
*.Pumping Speed: 50Hz :1600 l/min
60Hz: 1920 l/min
*.Ultimate Pressure
Gas Ballast Valve Close: 5*10(-4) Torr
Gas Ballast Valve Open: 1*10(-2) Torr
*.Power: 220V/380V/3∮*3.7kW
*.Oil Capacity:6.5
*.Cooling: Air cooling
GHP-340 Rotary Pump-旋轉油式幫浦
Model GHP-340
Introduction
.Sliding Vane Type Duble Stage.
.Small Size, Light Weight.
.Low Noise.
.Easy Maintenance.
.Anti-Oil Back Stream.
Features
*.Pumping Speed: 50Hz :341 l/min
60Hz: 408l/min
*.Ultimate Pressure
Gas Ballast Valve Close: 5*10(-4) Torr
Gas Ballast Valve Open: 1*10(-2) Torr
*.Power: 220V/380V/3∮*0.9kW
*.Oil Capacity:1.2~1.7
*.Cooling: Air cooling
GHP-550 Rotary Pump-旋轉油式幫浦
Model GHP-550
Introduction
.Sliding Vane Type Duble Stage.
.Small Size, Light Weight.
.Low Noise.
.Easy Maintenance.
.Anti-Oil Back Stream.
Features
*.Pumping Speed: 50Hz :550 l/min
60Hz: 605 l/min
*.Ultimate Pressure
Gas Ballast Valve Close: 5*10(-4) Torr
Gas Ballast Valve Open: 1*10(-2) Torr
*.Power: 220V/380V/3∮*0.9kW
*.Oil Capacity:1.2~1.7
*.Cooling: Air cooling
GHP-800 Rotary Pump-旋轉油式幫助
Model GHP-800
Introduction
.Sliding Vane Type Duble Stage.
.Small Size, Light Weight.
.Low Noise.
.Easy Maintenance.
.Anti-Oil Back Stream.
Features
*.Pumping Speed: 50Hz :800 l/min
60Hz: 960 l/min
*.Ultimate Pressure
Gas Ballast Valve Close: 5*10(-4) Torr
Gas Ballast Valve Open: 1*10(-2) Torr
*.Power: 220V/380V/3∮*1.5kW
*.Oil Capacity:3.0~4.3
*.Cooling: Air cooling
Dry Pump-乾式幫浦
Model T100L
Introduction
IPUP T100L is an ultra compact new generation dry vacuum pump jointly developed by Toyota Industries Corp. and Applied Materials, Inc., which is designed for installation on semiconductor equipment in cleanroom
